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发明名称
DRY ETCHING
摘要
申请公布号
JPH01200630(A)
申请公布日期
1989.08.11
申请号
JP19880025159
申请日期
1988.02.05
申请人
TOSHIBA CORP
发明人
HORIOKA KEIJI;OKANO HARUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
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代理人
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