| 摘要 |
PURPOSE:To simplify the adjustment of the angles of arrangements of spectroscopic crystals and X-ray detector by independently controlling a driving source which turns and drives the spectroscopic crystals and a driving source which turns and drives the X-ray detector around the spectroscopic crystals. CONSTITUTION:Spectroscopic measurement of fluorescence X rays 45 from a specimen 7 which is excited with exciting X rays 44 is performed. Thus the specimen 7 is analyzed. Spectroscopic crystals 2a-2d which divide the X rays are turned and driven with a pulse motor 21. An X-ray detector 3 which detects the divided X rays is turned and driven around the spectroscopic crystals 2a-2d with a pulse motor 22. The driving amounts of these motors 21 and 22 are controlled with a control device 25. In this way, angles formed between the X rays 25 and the crystal lattice planes of the spectroscopic crystals 2a - 2d and angles formed between the X rays 45 and the X rays to be detected are controlled so that the specified relationship is provided. |
