MANUFACTURE OF SEMICONDUCTOR FILM,申请号JP19880285420-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR FILM
摘要
申请公布号	JPH02130917(A)	申请公布日期	1990.05.18
申请号	JP19880285420	申请日期	1988.11.11
申请人	NEC CORP	发明人	FUJIMOTO HIROKI;OGURA ATSUSHI
分类号	C30B23/08;H01L21/02;H01L21/205;H01L21/84;H01L27/12	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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