| 摘要 |
<p>PURPOSE:To make it possible to accurately measure humidity in a wide range by a method wherein a humidity sensor is formed of a carbon particles dispersed porous silica film astride a pair of electrodes on an insulating substrate. CONSTITUTION:A pair of electrodes 3 and 3 are formed on an insulating substrate 1, and a carbon particle dispersed porous silica film 4 is formed astride the electrodes 3 and 3. The conductivity of the humidity sensor formed as above can be changed freely by the film thickness and the content of carbon particles in the film 4. Accordingly, a humidity sensor has excellent linearity of variation of the resistance value against the variation of a relative humidity, and also has the resistance value with which humidity can be measured easily even at a low temperature at which the resistance value becomes large, and as a result, a wide range of humidity can be measured in a precise manner.</p> |
