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发明名称
HEATING DEVICE
摘要
申请公布号
JPH02187015(A)
申请公布日期
1990.07.23
申请号
JP19890006481
申请日期
1989.01.13
申请人
TOKYO ELECTRON LTD;TERU KYUSHU KK
发明人
HIRAKAWA OSAMU;AKUMOTO MASAMI;ANAI NORIYUKI
分类号
H01L21/324;H01L21/027
主分类号
H01L21/324
代理机构
代理人
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地址
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