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发明名称
ELECTRON BEAM LITHOGRAPHY
摘要
申请公布号
JPH02192716(A)
申请公布日期
1990.07.30
申请号
JP19890012928
申请日期
1989.01.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWATSU AKINOBU;HOSHINOUCHI SUSUMU;YOSHIDA AKIO
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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