| 摘要 |
PURPOSE:To execute the positioning with high accuracy by using an ultrasonic motor operated by vibration for driving force, and controlling it by one period unit. CONSTITUTION:Four corners of a moving base 1 are notched, and ultrasonic motors 2 - 5 are attached thereto. In each motor, piezoelectric elements (lamination type which expands and contracts in the lengthwise direction) 6 - 8 are orthogonal to each other, a black 9 is attached to its intersection, and they become driving force generation sources of the motors 2 - 5. The motors 2 - 5 generate driving force in two directions in the surface on a base 10, therefore, the base 1 can execute a rotary motion, and also, a linear motion in any direction. The motors 2 - 5 are controlled by a motor position detecting system consisting of a laser measuring system 11, a semiconductor position detector 12, a divider 12 and a reflecting mirror 14, and a driving circuit 16 for controlling the motors 2 - 5 by one period unit, based on this information. A motor position detecting system containing a reflecting mirror 15 detects a motor position in the direction orthogonal to the previous detecting system. These two detecting systems output position information to the circuit 16, and the circuit 16 moves the motors 2 - 5 to prescribed positions. |
