| 摘要 |
PURPOSE:To obtain an x-ray generating apparatus having directivity and generating a large number of x-ray photons by generating x-ray by bringing laser light to come into collision with accelerated ions or element particles. CONSTITUTION:Accelerated positive or negative ions or neutral element particles of hydrogen, oxygen, arsenic, silicon, boron, etc., from a microtron or an ion accelerator pipe are introduced into a circular track 4 of a storage ring composed with potassium nitrate M1, M2 controlled by an electric power source V and a resistor R and accelerated by a high frequency cavity 5 and run circularly. Laser light P1, P2 coming from a laser light wave 1 and reciprocally moving between mirrors 2, 3 is brought to collide with injection ions H1 which come in an interaction region 8 to interact with ions, etc., and they are converted into recoil ions H2 and recoil x-ray photons P3 and the recoil ions H2 come into a circular track and are stored there. Having directivity, the recoil x-ray photons P3 pass through a mask 6 and are irradiated to a resist- coated sample such as a Si wafer to be exposed. Like this, an apparatus to generate x-ray with good directivity is obtained. |
