| 摘要 |
PURPOSE:To facilitate the separation of a substrate, on both the front and rear sides of which diffraction gratings are reproduced, by a method wherein the edge face of the substrate and the inclined plane of a flat plate, both of which have the same tilt angle, are brought into contact with each other and, after that, the flat plate is lifted about a revolving fulcrum. CONSTITUTION:An inclined plane 19, which is formed at the separating part 18 of a flat plate 14 and the edge face 10 of a substrate 8, both of which have the same tilt angle, are brought into contact with each other. By turning a screw 16, which is mounted to the movable part 17 of the flat plate 14, the flat plate 14 is lifted about the revolving fulcrum A of a supporting part 15 so as to separate the substrate from a stamper 11. Thus, rectilinear diffraction grating 8a can be reproduced on one side of the substrate. In case of the reproduction of rectilinear diffraction grating 8b on the opposite side, the reproduction is done by performing similar operation under the state that the reproduced side of the substrate is turned upside down. Even when the separation of deep- grooved rectilinear diffraction gratings is intended for reproduction, no tilting of grating develops and consequently a diffraction grating with very few defect can be obtained. |
