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发明名称
HIGH FREQUENCY EXCITATION COIL AND METHOD AND APPARATUS FOR FORMING FILM BY USING SAME
摘要
申请公布号
JPH0317264(A)
申请公布日期
1991.01.25
申请号
JP19890150575
申请日期
1989.06.15
申请人
CANON INC
发明人
HASHIMOTO SHIGERU
分类号
C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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