| 摘要 |
PURPOSE:To prevent the breakage of a heat reflecting plate due to an electric discharge and a decrease in the reflection efficiency caused by the deposition of impurities formed by the discharge and to improve the output of a laser by arranging the heat reflecting plate enclosed with an insulating plate in a vacuum layer covering a vessel to prevent the generation of a discharge. CONSTITUTION:The material vapor generator is formed by the vessel 2 (discharge tube) for internally generating metal vapor, the vacuum layer 9 covering the vessel 2, etc. The heat reflecting plates 15a and 15b covering the vessel 2 are arranged in the vacuum layer 9. In addition, the insulating plates 16a and 16b enclosing the heat insulating plates 16a and 16b are arranged in the vacuum layer 9. |
