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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0322562(A)
申请公布日期
1991.01.30
申请号
JP19890157759
申请日期
1989.06.20
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KANDA AKIHIRO;HIRAI TAKEHIRO;FUJITA YOSHIRO;TANAKA MITSUO
分类号
H01L27/04;H01L21/28;H01L21/822
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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