| 摘要 |
PURPOSE: To actuate a heat insulating system of a high temperature reactor containing chlorosilane and hydrogen for a long period of time by constituting it of an inner radiant heat shield made of graphite and a outer rigid felt heat insulating layer with carbon as a main component. CONSTITUTION: An external drum 5 of a high temperature reactor containing chlorosilane and hydrogen is constituted by sequentially forming an outer carbon base rigid heat insulating layer 4 with carbon as a main component and an inner radiant heat shield 3 made of graphite in structure to laminate a lap 7 through a spacer 6 on an inner peripheral surface and arranging a heating element 2 in a reaction region 1 of its central part. Consequently, it is possible to lower interfacial temperature between the graphite radial heat shield 3 and the felt 4 with carbon high in density as a main component by the graphite radial heat shield 3 so that the felt 4 with carbon as the main component becomes lower than about 1000 deg.C which is low in reactivity with hydrogen and chlorosilane. Consequently, it is possible to drive this system at high and efficient temperature for a long period of time. |
