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发明名称
ZUSAMMENSETZUNG FUER DIE HERSTELLUNG VON INTEGRIERTEN SCHALTUNGEN, ANWENDUNGS- UND HERSTELLUNGSMETHODE.
摘要
申请公布号
DE3768876(D1)
申请公布日期
1991.05.02
申请号
DE19873768876
申请日期
1987.07.07
申请人
MICRO-IMAGE TECHNOLOGY LTD., LONDON, GB
发明人
LAPHAM, DAVID JOHN, WIDNES CHESHIRE, WA8 OYE, GB;HITCHMOUGH, GEOFFREY, RUNCORN CHESHIRE, GB
分类号
H01L21/30;G03C11/00;G03F7/00;G03F7/42;H01L21/027;(IPC1-7):G03F7/42
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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