CONTINUOUS CHEMICAL VAPOUR DEPOSITION SYSTEM,申请号EP19890123167-传众专利搜索

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发明名称	CONTINUOUS CHEMICAL VAPOUR DEPOSITION SYSTEM
摘要
申请公布号	EP0378815(A3)	申请公布日期	1991.07.31
申请号	EP19890123167	申请日期	1989.12.14
申请人	TEXAS INSTRUMENTS INCORPORATED	发明人	ISHII, KAORU;WILKINSON, THOMAS F.;MOROI, MASAYUKI
分类号	C23C16/44;C23C16/455;C23C16/54;H01L21/00;H01L21/205;H01L21/31;(IPC1-7):C23C16/54	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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