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发明名称
PROBE CARD
摘要
申请公布号
JPH03199976(A)
申请公布日期
1991.08.30
申请号
JP19890336661
申请日期
1989.12.27
申请人
TOSHIBA CORP
发明人
TSUKISHIRO SHIZUO
分类号
G01R31/26;G01R1/073;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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地址
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