| 摘要 |
PURPOSE:To prevent the decomposition of the resin component of an adhesive by forming a layer which totally reflects UV rays in the peripheral part on the surface of a pellicle film opposite from the surface to be adhered to a pellicle frame. CONSTITUTION:The pellicle film 1 consisting of nitrocellulose is adhered by the adhesive 3 of an acrylic resin system to the pellicle frame 2 and the totally reflecting layer 5 consisting of aluminum which totally reflects the UV rays is formed at a prescribed width from the circumference by a sputtering method. The UV rays of the wavelength below (i) rays are reflected by the totally reflecting layer even in the case of use of these UV rays if such pellicle is used. The decomposition of the resin component of the adhesive 3 of the acrylic resin system for sticking the pellicle film 1 to the pellicle frame 2 is obviated in this way and the long-term use of the pellicle is possible. |
