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发明名称
VORRICHTUNG ZUR SCHNELLEN OPTISCHEN BEWERTUNG VON STRUKTURIERUNGSPROZESSEN
摘要
申请公布号
DD298442(A5)
申请公布日期
1992.02.20
申请号
DD19890335502
申请日期
1989.12.11
申请人
VEB MIKROELEKTRONIK "KARL MARX",DE
发明人
HEIN,THOMAS,DE;HEIN,VERENA,DE;BEUTEL,BERND,DD
分类号
G01B11/02;(IPC1-7):G01B11/02
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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