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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH04128382(A)
申请公布日期
1992.04.28
申请号
JP19900249810
申请日期
1990.09.19
申请人
NEC CORP
发明人
HOSHINO SHIGEKI
分类号
C23C16/50;C23C16/27;C23C16/511
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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