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发明名称
MANUFACTURE OF CRYSTALLINE SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH04186723(A)
申请公布日期
1992.07.03
申请号
JP19900315420
申请日期
1990.11.20
申请人
SEIKO EPSON CORP
发明人
YAZAKI MASATOSHI
分类号
H01L21/20;H01L21/324;H01L21/84
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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