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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH04186628(A)
申请公布日期
1992.07.03
申请号
JP19900312323
申请日期
1990.11.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YANO KOSAKU;UEDA TETSUYA;TSUJI KAZUHIKO
分类号
H01L21/3205
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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