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发明名称
METHOD AND DEVICE FOR MANUFACTURING THIN-FILM
摘要
申请公布号
JPH04186529(A)
申请公布日期
1992.07.03
申请号
JP19900319002
申请日期
1990.11.21
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HONDA KAZUYOSHI;MAEZAWA KAJI
分类号
G11B5/85
主分类号
G11B5/85
代理机构
代理人
主权项
地址
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