发明名称 ADHESIVE FILM FORMING DEVICE
摘要 PURPOSE:To provide an adhesive film forming device for applying a conductive adhesive to contacts of IC chips, etc., to form a stable conductive adhesive film for a long time. CONSTITUTION:This is an adhesive film forming device which has a supporting body 1 having the adhesive film formation surface coated with titanium nitride 2. Using a formation blade, a conductive adhesive film 5 is formed on the film formation surface. After that, protruding contacts 8 of an IC chip 6 are dipped in the conductive adhesive film 5 to transfer-apply a conductive adhesive to the protruding contacts 8. By coating the supporting body of the conductive adhesive film forming device with titanium nitride, a hardness, an abrasion resistance, an acid resistance and a corrosion resistance are increased and thereby the supporting body is prevented from becoming deteriorated. Therefore, a stable conductive adhesive film can be formed for a long time.
申请公布号 JPH04313246(A) 申请公布日期 1992.11.05
申请号 JP19910078885 申请日期 1991.04.11
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KISHIMOTO KUNIO;NAKAMURA SHINJI;TAKENAKA TOSHIAKI;NISHII TOSHIHIRO;KAWAZU AKIYOSHI;FUJITA HIKARI
分类号 H01L21/52;H01L21/321;H01L21/60 主分类号 H01L21/52
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