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发明名称
CONVEYING MECHANISM FOR WAFER PROCESSING SYSTEM
摘要
申请公布号
JPH04316329(A)
申请公布日期
1992.11.06
申请号
JP19910082779
申请日期
1991.04.16
申请人
NEC YAMAGATA LTD
发明人
SEIWA AKINOBU
分类号
B66C1/28;H01L21/304;H01L21/677;H01L21/68
主分类号
B66C1/28
代理机构
代理人
主权项
地址
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