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发明名称
ARRANGEMENT DESIGNING SYSTEM
摘要
申请公布号
JPH0535822(A)
申请公布日期
1993.02.12
申请号
JP19910189651
申请日期
1991.07.30
申请人
NEC CORP
发明人
YABE MASASHI
分类号
H01L21/82;G06F17/50
主分类号
H01L21/82
代理机构
代理人
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地址
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