| 摘要 |
PURPOSE:To perform high-speed raster scanning without increasing the driving speed of an XY-direction deflector neither preparing a high-intensity light source. CONSTITUTION:In the caster scanner which irradiates the surface of a mask 3 with circular beam light R1 from a light source 1 by an XY-direction deflector 2, a cylindrical lens 5A or a prism 5B is arranged in the optical path between the light source 1 and the XY-direction deflector 2 or in the optical path in the XY-direction deflector 2 so that the major axis of the cylindrical lens 5A is orthogonal to the raster scanning direction or the top side of the prism 5B divides the incident beam light R1 into two and coincides with the raster scanning direction. |
