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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0567623(A)
申请公布日期
1993.03.19
申请号
JP19910226722
申请日期
1991.09.06
申请人
NEC CORP
发明人
TSUDA HIROSHI
分类号
H01L29/73;H01L21/331;H01L29/732
主分类号
H01L29/73
代理机构
代理人
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地址
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