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发明名称
HIGH-FREQUENCY PLASMA CVD DEVICE
摘要
申请公布号
JPH0570958(A)
申请公布日期
1993.03.23
申请号
JP19910262504
申请日期
1991.09.17
申请人
SUMITOMO HEAVY IND LTD
发明人
TOKUNAGA YASUO
分类号
C23C16/50;C23C16/505;H01L21/205
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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