摘要 |
PURPOSE:To provide a photovoltaic element having a large photoelectromotive force and a large photoelectric current, by removing the distortion of a transparent electrode. CONSTITUTION:In a photovoltaic element wherein at least p-type, i-type and n-type semiconductor layers made of non-single crystal semiconductor materials containing silicon atoms and the transparent electrode thereon 107 are laminated on a conductive substrate 101, the transparent electrode 107 is made of such an oxide containing carbon atoms as indium oxide, tin oxide and indium-tin oxide, and carbon atoms are distributed more on the side of the semiconductor layers. |