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发明名称
ULTRAVIOLET WASHING DEVICE WITH WASHING DEGREE MEASURING MECHANISM
摘要
申请公布号
JPH05166775(A)
申请公布日期
1993.07.02
申请号
JP19910332010
申请日期
1991.12.16
申请人
ORC MFG CO LTD
发明人
SERIZAWA IZUMI;ISHIBASHI NORIO
分类号
G01N27/60;H01L21/304
主分类号
G01N27/60
代理机构
代理人
主权项
地址
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