APPARATUS AND PROCESS FOR PRODUCTION OF SILICON CARBIDE BULK SINGLE CRYSTAL,申请号JP19910347316-传众专利搜索

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发明名称	APPARATUS AND PROCESS FOR PRODUCTION OF SILICON CARBIDE BULK SINGLE CRYSTAL
摘要
申请公布号	JPH05178698(A)	申请公布日期	1993.07.20
申请号	JP19910347316	申请日期	1991.12.27
申请人	SHARP CORP	发明人	FURUKAWA MASAKI;TAJIMA YOSHIMITSU;SUZUKI AKIRA
分类号	C23C16/32;C30B29/36	主分类号	C23C16/32
代理机构		代理人
主权项
地址

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