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发明名称
CVD APPARATUS
摘要
申请公布号
JPH05190472(A)
申请公布日期
1993.07.30
申请号
JP19920026214
申请日期
1992.01.17
申请人
KOKUSAI ELECTRIC CO LTD
发明人
YAZAWA HIDEO
分类号
C23C16/46;H01L21/205;H01L21/31
主分类号
C23C16/46
代理机构
代理人
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