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发明名称
VACUUM DEPOSITION METHOD
摘要
申请公布号
JPH05202467(A)
申请公布日期
1993.08.10
申请号
JP19920012668
申请日期
1992.01.28
申请人
STANLEY ELECTRIC CO LTD
发明人
SUZUKI YOSHIO;YOSHIDA MAKOTO;OKADA SATOSHI
分类号
C23C14/30;C30B15/00;C30B29/06;H01J37/18;H01J37/30
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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