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发明名称
摘要
申请公布号
JPH05259196(A)
申请公布日期
1993.10.08
申请号
JP19930000687
申请日期
1993.01.06
申请人
发明人
分类号
H01L29/762;H01L21/339;H01L29/10;H01L29/768;(IPC1-7):H01L21/339;H01L29/796
主分类号
H01L29/762
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