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发明名称	FORMATION METHOD OF COLLECTOR PLUG
摘要
申请公布号	JPH05267316(A)	申请公布日期	1993.10.15
申请号	JP19920060516	申请日期	1992.03.17
申请人		发明人
分类号	H01L21/74;H01L21/331;H01L29/73;(IPC1-7):H01L21/331	主分类号	H01L21/74
代理机构		代理人
主权项
地址

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