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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR930010969(B1)
申请公布日期
1993.11.18
申请号
KR19890020121
申请日期
1989.12.29
申请人
FUJITSU LTD.
发明人
INOUE, MINORU;WATANABE, KIYOSHI;HARIU, TAKENORI
分类号
H01L21/3205;H01L21/285;H01L21/768;(IPC1-7):H01L21/285
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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