| 摘要 |
<p>PURPOSE: To provide an apparatus and method for scribing a fragile substrate and breaking the same. CONSTITUTION: A scribing tool is reciprocated relatively to a substrate 18 to be scribed to form scribe lines 24a on the substrate 18. Secondly, the tool is separated from the substrate 18, profile members 60, 62 of a breaking wheel engage on the substrate on the both sides of the scribe lines 24a. Further, a breaking edge 56 engages with the substrate from below between the profile members 60, 62. The wheel is moved downward to separate the substrate along the scribe lines 24a. Subsequently, the wheel is separated from the substrate, and with both of the scribing tool and the breaking wheel separated therefrom, the substrate is sent by stages sideways, that is, in the lateral direction. The breaking wheel is fitted to an arm 32 connected to the apparatus, and preferably it is capable of moving forward and backward through the substrate 18 with the scribing tool.</p> |
