Light beam dividing apparatus forming homogeneous part-beams - has multiple lenses with convex input side and prism-shaped output side followed by collecting lens

摘要

The apparatus divides up a light beam into at least two spatially separated homogenous part-beams. The apparatus comprises a number of lenses (16a, 16b, 16c). The lenses in cross-section in a plane which is parallel to the propagation direction (18) of the light beam, are respectively convex on the incident side (20) and prism-shaped on the output side (22). A collecting lens (24) is arranged in the propagation direction of the light beam behind th lenses. USE/ADVANTAGE - Especially for ultra-violet radiation as produced by excimer laser. Homogenises light beam and produces spatially separated part-beams with defined spatial angle energy distribution.