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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH0666895(A)
申请公布日期
1994.03.11
申请号
JP19920095727
申请日期
1992.04.16
申请人
NEC CORP
发明人
INOHARA HIROKI
分类号
G01R31/302;G01R31/28;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/302
代理机构
代理人
主权项
地址
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