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发明名称
PROBE BOARD
摘要
申请公布号
JPH06163653(A)
申请公布日期
1994.06.10
申请号
JP19920313255
申请日期
1992.11.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMANO TAKESHI
分类号
G01R1/073;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
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