CHARGED PARTICLE BEAM LITHOGRAPHY DEVICE,申请号JP19920306796-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM LITHOGRAPHY DEVICE
摘要
申请公布号	JPH06163375(A)	申请公布日期	1994.06.10
申请号	JP19920306796	申请日期	1992.11.17
申请人	NIKON CORP	发明人	HATA KAZUNARI
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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