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发明名称
DC PLASMA PRODUCING DEVICE
摘要
申请公布号
JPH06163190(A)
申请公布日期
1994.06.10
申请号
JP19920314779
申请日期
1992.11.25
申请人
YAZAKI CORP
发明人
SHINDO MASASHI;YAMANASHI HIDENORI;IKETANI AKIRA
分类号
C23C16/50;H05H1/46;(IPC1-7):H05H1/46
主分类号
C23C16/50
代理机构
代理人
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地址
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