| 摘要 |
An adhesive film position detector and an adhesive film attachment apparatus are provided to correct positional deviation around a center shaft of a semiconductor substrate based on the detection result of a detection unit using a control unit. An adhesive film position detector(1) comprises an illuminating unit(7), a black plate, a dimming unit(9), an illumination angle control unit(13), and an imaging medium(11). The illuminating unit irradiates the light at the end part of an adhesive film(5) adhering at constant intervals. The black plate is installed at the lower part of the base film in which the light is irradiated from the illuminating unit. The dimming unit controls the intensity of the light of the illuminating unit. The imaging device is formed in the vertical upward direction to the adhesive film. The light irradiated from the illuminating unit is diffused and reflected at the end part of the adhesive film and the location of the adhesive film is detected by receiving the light reflected with diffusion as the imaging medium.
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