发明名称 Backside coating prevention device.
摘要 <p>A backside coating prevention device adapted for a coating chamber for coating plate-shaped substrates (100) is provided, said coating chamber being adapted for coating continuously or discontinuously transported plate-shaped substrates, comprising a front wall having a substrate feeding opening (20) and a rear wall having a substrate discharge opening (22), a coating material source (26) adapted for dispensing coating material into the coating chamber, and a transport system (32,33), a front side of the transport system facing the coating material source, the transport system being adapted for continuously or discontinuously transporting a plurality of plate-shaped substrates along a transport path on the front side of the transport system, wherein said backside coating prevention device is adapted for providing a gas barrier at the front side of the transport system and adjacent to the backsides of the plurality of plate-shapes substrates for preventing backside coating of the plate-shaped substrates.</p>
申请公布号 EP2096192(A1) 申请公布日期 2009.09.02
申请号 EP20080160908 申请日期 2008.07.22
申请人 APPLIED MATERIALS, INC. 发明人 SAUER, ANDREAS;HENRICH, JUERGEN;GEBELE, THOMAS
分类号 C23C16/455;C23C14/56 主分类号 C23C16/455
代理机构 代理人
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