发明名称 |
METHOD AND APPARATUS FOR SCANNED INSTRUMENT CALIBRATION |
摘要 |
Methods and apparatus for calibration of a scanned beam system are provided by sampling a calibration specimen containing an array of targets with a spacing between samples that is greater than the spacing between targets in the array and forming an image from the samples to reduce calibration specimen degradation and to magnify calibration errors to enable very fine calibration of the scanned beam system. |
申请公布号 |
EP1428006(A4) |
申请公布日期 |
2009.09.02 |
申请号 |
EP20020749692 |
申请日期 |
2002.06.28 |
申请人 |
FEI COMPANY |
发明人 |
LEZEC, HENRI, J.;MUSIL, CHRISTIAN R. |
分类号 |
C23C16/04;G01N1/00;G01N23/225;G21K5/00;H01J37/147;H01J37/21;H01L21/02;H01L21/285 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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