发明名称 |
Lithographic apparatus and semiconductor device manufacturing method |
摘要 |
<p>In a lithographic apparatus, a feedforward transfer function of a control system, is determined by : a) iteratively learning a feedforward output signal of the control system by iterative learning control for a given setpoint signal; b) determining a relation between the learned feedforward output signal and the setpoint signal; and c) applying the relation as the feedforward transfer function of the control system. A learned feedforward, which has been learned for one or more specific setpoint signals only, can be adapted to provide a setpoint signal dependent feedforward output signal. The learned feedforward can be made more robust against setpoint variations.
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申请公布号 |
EP1962157(A3) |
申请公布日期 |
2009.09.02 |
申请号 |
EP20080075116 |
申请日期 |
2008.02.13 |
申请人 |
ASML NETHERLANDS BV |
发明人 |
HEERTJES, MARCEL FRANCOIS;TSO, YIN-TIM;KAMIDI, RAMIDIN IZAIR;BAGGEN, MARK CONSTANT JOHANNES;BAGGEN, CONSTANT PAUL MARIE JOZEF;VAN DE MOLENGRAFT, MARINUS JACOBUS GERERDUS |
分类号 |
G05B13/02 |
主分类号 |
G05B13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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