MANUFACTURING METHOD OF NANO WIRE AND NANOWIRE HYDROGEN GAS SENSOR

摘要

A method for manufacturing nanowire and a nanowire hydrogen sensor is provided to produce a high-sensitivity hydrogen sensor to respond to the wide range of hydrogen concentration when palladium is used as a metal material. A method for manufacturing nanowire and a nanowire hydrogen sensor comprises: a first step of depositing an insulating layer(2) on a substrate(1); a second step of forming metal electrodes(3) on the insulating layer; a third step of forming a raw material layer(5) for nanowire on the metal electrodes; and a fourth step of applying high frequency alternating current power to the metal electrodes so as to form nanowire(6). In the third step, a raw material-containing solution is supplied between the metal electrodes and then the DC power is applied to it.