METHOD AND APPARATUS FOR MANUFACTURING TRICHLOROSILANE

摘要

A method and an apparatus for preparing trichlorosilane are provided to produce the trichlorosilane by decomposing a polymer separated from a crude TCS of a chlorination process and a polymer separated from exhaust gas of a polycrystalline silicon manufacturing process. A manufacturing method of trichlorosilane includes a step for manufacturing the trichlorosilane by reacting a polymer and hydrogen chloride in temperature of 450°C or more after mixing the polymer containing chlorosilane group with the hydrogen chloride. The polymer and the hydrogen chloride are reacted in a furnace(33) at the temperature of 450°C ~ 700 °C. The gas containing the hydrogen chloride hydrogen chloride is introduced to the furnace. The manufacturing method of trichlorosilane further includes a step for reacting the polymer and the hydrogen chloride after inputting gas containing the hydrogen chloride 10~30 mass % and the polymer containing high-boiling chlorosilane 20~50 mass % in the furnace.