Varactor apparatuses and methods

摘要

Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, system and related methods are provided.
The MEMS comprises:
- A movable component with two portions;
- A substrate;
wherein the distance between each portion and the substrate is different,
- A couple of electrodes on the movable component and on the substrate and
- A pair of capacitive electrodes opposed to each other and which move in relation to each other when a voltage is applied to the couple of electrodes.