发明名称 |
AUTOMATION FOR HIGH THROUGHPUT SEMICONDUCTOR BATCH-WAFER PROCESSING EQUIPMENT |
摘要 |
<p>An embodiment of the present invention is a technique to automate transfer of parts for high throughput. A boat transfer unit (BTU) arm carrying a boat containing a plurality of parts is rotated from an initial position to a first position that is below a process chamber. The BTU arm engages a boat support that supports the boat. The BTU arm is moved upward to a second position such that the boat partially enters the process chamber at a distance D with respect to an entrance opening of the process chamber. An elevator arm carrying a pedestal is engaged to lower side of the boat support. The BTU arm is moved away from the second position. The elevator arm is moved upward to fully insert the boat inside the process chamber.</p> |
申请公布号 |
KR20090093994(A) |
申请公布日期 |
2009.09.02 |
申请号 |
KR20097012682 |
申请日期 |
2007.11.08 |
申请人 |
BEIJING SEVENSTAR ELECTRONICS CO., LTD. |
发明人 |
EMAMI ARSALAN ALAN;AGAMOHAMADI MITCH;SEDEHI SAEED |
分类号 |
H01L21/677;H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|